Reliability Approach in View of Damping in MEMS Resonator

Abstract

MEMS resonators are important component in most of the RF applications. For reliable operation Quality factor should be high and important in transceivers for synchronizing and better sensitivity. This paper presents overview of work done in the area of energy dissipation due to damping in MEMS resonator and to understand techniques which can helps in minimizing its effect. It also suggests an approach to study the different damping mechanisms and analysis of reliability in view of aging and performance through accelerated testing.