Modeling and Simulation of H and T Shape Capacitive Comb Accelerometer

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Satyanarayana Talam
Anusha Ganta
Neela .R

Abstract

The paper Presents the modeling and simulation of a highly sensitive three axis Micro Electro Mechanical
Systems (MEMS) based H and T shape Capacitive Accelerometer . The MEMS Capacitive Accelerometer
Sensor which both capacitance and displacement are the primary sensing characteristics. The differential
capacitive accelerometer produces displacement and capacitance due to applied acceleration. The main focus of
the work has to improve the displacement sensitivity by changing the diaphragm dimensions with applied input
acceleration from 1g to 10g.The H and T shape accelerometers

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How to Cite
Talam, S. ., Ganta, A. ., & Neela .R. (2020). Modeling and Simulation of H and T Shape Capacitive Comb Accelerometer. Helix, 10(01), 27-32. Retrieved from https://helixscientific.pub/index.php/home/article/view/50
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