JOSHI, P. K. . Reliability Approach in View of Damping in MEMS Resonator. Helix, [S. l.], v. 10, n. 04, p. 01-05, 2020. Disponível em: https://helixscientific.pub/index.php/home/article/view/192. Acesso em: 6 dec. 2020.